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1

Distributed force probe bending model of critical dimension atomic force microscopy bias

Ukraintsev, Vladimir A., Orji, Ndubuisi G., Vorburger, Theodore V., Dixson, Ronald G., Fu, Joseph, Silver, Rick M.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 4.03 MB

english, 2013

2

Lateral tip control effects in critical dimension atomic force microscope metrology: the large tip limit

Dixson, Ronald G., Orji, Ndubuisi G., Goldband, Ryan S.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 968 KB

english, 2016

3

SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 21 August 2011)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V - Strategies for nanoscale contour metrology using critical dimension atomic force microscopy

Orji, Ndubuisi G., Postek, Michael T., Dixson, Ronald G., Vládar, András E., Postek, Michael T.

Year:

2011

Language:

english

File:

PDF, 755 KB

english, 2011

4

Contour metrology using critical dimension atomic force microscopy

Orji, Ndubuisi G., Dixson, Ronald G., Ng, Boon Ping, Vladár, András E., Postek, Michael T.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 3.31 MB

english, 2016

5

Multiple-instrument evaluation of the consistency and long-term stability of tip width calibration for critical dimension atomic force microscopy

Dixson, Ronald G., Orji, Ndubuisi G.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2017

Language:

english

File:

PDF, 1.01 MB

english, 2017

6

Tip-on-tip imaging and self-consistent calibration using critical dimension atomic force microscopy

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2017

Language:

english

File:

PDF, 1.40 MB

english, 2017

7

Scanning probe microscope dimensional metrology at NIST

Kramar, John A, Dixson, Ronald, Orji, Ndubuisi G

Journal:

Measurement Science and Technology

Year:

2011

Language:

english

File:

PDF, 1.33 MB

english, 2011

8

Robust auto-alignment technique for orientation-dependent etching of nanostructures

McGray, Craig D., Kasica, Richard, Orji, Ndubuisi G., Dixson, Ronald, Cresswell, Michael W., Allen, Richard A., Geist, Jon

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 3.22 MB

english, 2012

9

Process optimization for lattice-selective wet etching of crystalline silicon structures

Dixson, Ronald G., Guthrie, William F., Allen, Richard A., Orji, Ndubuisi G., Cresswell, Michael W., Murabito, Christine E.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 1.46 MB

english, 2016

10

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Traceable atomic force microscope dimensional metrology at NIST

Dixson, Ronald, Archie, Chas N., Orji, Ndubuisi G., Fu, Joseph, Cresswell, Michael, Allen, Rich, Guthrie, Will

Year:

2006

Language:

english

File:

PDF, 132 KB

english, 2006

11

Transmission electron microscope calibration methods for critical dimension standards

Orji, Ndubuisi G., Dixson, Ronald G., Garcia-Gutierrez, Domingo I., Bunday, Benjamin D., Bishop, Michael, Cresswell, Michael W., Allen, Richard A., Allgair, John A.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 2.71 MB

english, 2016

12

Traceable calibration of a critical dimension atomic force microscope

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.98 MB

english, 2012

13

Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Qin, Jing, Silver, Richard M, Barnes, Bryan M, Zhou, Hui, Dixson, Ronald G, Henn, Mark-Alexander

Journal:

Light: Science & Applications

Year:

2016

Language:

english

File:

PDF, 41.69 MB

english, 2016

14

Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

Choi, Jinho, Park, Byong Chon, Ahn, Sang Jung, Kim, Dal-Hyun, Lyou, Joon, Dixson, Ronald G., Orji, Ndubuisi G., Fu, Joseph, Vorburger, Theodore V.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 3.46 MB

english, 2016

15

Spatial Dimensions in Atomic Force Microscopy: Instruments, Effects, and Measurements

Dixson, Ronald, Orji, Ndubuisi, Misumi, Ichiko, Dai, Gaoliang

Journal:

Ultramicroscopy

Year:

2018

Language:

english

File:

PDF, 1.65 MB

english, 2018

16

Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy

Rim, Min-Ho, Agocs, Emil, Dixson, Ronald, Kavuri, Prem, VladÃ¡r, AndrÃ¡s E., Attota, Ravi Kiran

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2020

File:

PDF, 3.22 MB

2020

17

Generalized ellipsometry of artificially designed line width roughness

Martin Foldyna, Thomas A. Germer, Brent C. Bergner, Ronald G. Dixson

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 579 KB

english, 2011

18

Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Smith, Stewart, Tsiamis, Andreas, McCallum, Martin, Hourd, Andrew C., Stevenson, J. T. M., Walton, Anthony J., Dixson, Ronald G., Allen, Richard A., Potzick, James E., Cresswell, Michael W., Orji, Ndu

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2009

Language:

english

File:

PDF, 896 KB

english, 2009

19

Effects of lateral tip control in CD-AFM width metrology

Dixson, Ronald, Ping Ng, Boon, Orji, Ndubuisi

Journal:

Measurement Science and Technology

Year:

2014

Language:

english

File:

PDF, 3.50 MB

english, 2014

20

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Determination of optimal parameters for CD-SEM measurement of line-edge roughness

Bunday, Benjamin D., Bishop, Michael, McCormack, Jr., Donald W., Villarrubia, John S., Vladar, Andras E., Dixson, Ronald, Vorburger, Theodore V., Orji, N. G., Allgair, John A., Silver, Richard M.

Year:

2004

Language:

english

File:

PDF, 509 KB

english, 2004

21

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Metrology, Inspection, and Process Control for Microlithography XXIV - Proximity-associated errors in contour metrology

Villarrubia, John S., Raymond, Christopher J., Dixson, Ronald G., Vladár, András E.

Year:

2010

Language:

english

File:

PDF, 1.30 MB

english, 2010

22

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Contour metrology using critical dimension atomic force microscopy

Orji, Ndubuisi G., Dixson, Ronald G., Vladár, András E., Ming, Bin, Postek, Michael T., Starikov, Alexander

Year:

2012

Language:

english

File:

PDF, 1.32 MB

english, 2012

23

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

Dixson, Ronald, Archie, Chas N., Orji, Ndubuisi G.

Year:

2007

Language:

english

File:

PDF, 131 KB

english, 2007

24

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Measurement of a CD and sidewall angle artifact with two-dimensional CD AFM metrology

Dixson, Ronald G., Sullivan, Neal T., Schneir, Jason, McWaid, Thomas H., Tsai, Vincent W., Prochazka, Jerry, Young, Michael, Jones, Susan K.

Year:

1996

Language:

english

File:

PDF, 616 KB

english, 1996

25

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Traceable calibration of AFM step height measurements for integrated circuit manufacturing

Robert, James, Allgair, John A., Raymond, Christopher J., Banke, Bill, Dixson, Ronald, Strocchia-Rivera, Carlos

Year:

2008

Language:

english

File:

PDF, 353 KB

english, 2008

26

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards

Dixson, Ronald G., Archie, Chas N., Guthrie, William F., Cresswell, Michael, Allen, Richard A., Orji, Ndubuisi G.

Year:

2007

Language:

english

File:

PDF, 174 KB

english, 2007

27

Advanced metrology needs for nanoelectronics lithography

Stephen Knight, Ronald Dixson, Ronald L. Jones, Eric K. Lin, Ndubuisi G. Orji, R. Silver, John S. Villarrubia, András E. Vladár, Wen-li Wu

Journal:

Comptes Rendus Physique

Year:

2006

File:

PDF, 987 KB

2006

28

Computational Models of a Nano Probe Tip for Static Behaviors

Shaw C. Feng, Theodore V. Vorburger, Che bong Joung, Ronald G. Dixson, Joseph Fu, Li Ma

Journal:

Year:

2008

Language:

english

File:

PDF, 497 KB

english, 2008

29

Three-dimensional Image Correction of Tilted Samples Through Coordinate Transformation

Joseph Fu, Wei Chu, Ronald Dixson, Theodore Vorburger

Journal:

Year:

2008

Language:

english

File:

PDF, 107 KB

english, 2008

30

Traceable pico-meter level step height metrology

Ndubuisi G. Orji, Ronald G. Dixson, Joseph Fu, Theodore V. Vorburger

Journal:

Year:

2004

Language:

english

File:

PDF, 268 KB

english, 2004

31

Cystic fibrosis genotypes and alcoholic pancreatitis

IAN D NORTON, MINOTI V APTE, HUGH DIXSON, RONALD J TRENT, PAUL S HABER, ROMANO C PIROLA, JEREMY S WILSON

Journal:

Journal of Gastroenterology and Hepatology

Year:

1998

Language:

english

File:

PDF, 730 KB

english, 1998

32

Linewidth measurement technique using through-focus optical images

Attota, Ravikiran, Silver, Richard, Dixson, Ronald

Journal:

Year:

2008

Language:

english

File:

PDF, 1.99 MB

english, 2008

33

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 23 April 2012)] Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Progress on CD-AFM tip width calibration standards

Dixson, Ronald, Ng, Boon Ping, McGray, Craig D., Orji, Ndubuisi G., Geist, Jon

Year:

2012

Language:

english

File:

PDF, 1.18 MB

english, 2012

34

A moving window correlation method to reduce the distortion of scanning probe microscope images

Chu, Wei, Fu, Joseph, Dixson, Ronald, Orji, George, Vorburger, Theodore

Journal:

Review of Scientific Instruments

Year:

2009

Language:

english

File:

PDF, 626 KB

english, 2009

35

N-Substituted sulfonamide carbonic anhydrase inhibitors with topical effects on intraocular pressure

Duffel, Michael W., Ing, I. Silwai, Segarra, Tyrone M., Dixson, John A., Barfknecht, Charles F., Schoenwald, Ronald D.

Journal:

Journal of Medicinal Chemistry

Year:

1986

Language:

english

File:

PDF, 895 KB

english, 1986

36

Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes

Attota, Ravikiran, Dixson, Ronald G.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 1.25 MB

english, 2014

37

Topical carbonic anhydrase inhibitors

Schoenwald, Ronald D., Eller, Mark G., Dixson, John A., Barfknecht, Charles F.

Journal:

Journal of Medicinal Chemistry

Year:

1984

Language:

english

File:

PDF, 391 KB

english, 1984

38

[IEEE 2007 IEEE International Conference on Microelectronic Test Structures - Bunkyo-ku, Japan (2007.03.19-2007.03.22)] 2007 IEEE International Conference on Microelectronic Test Structures - A Systematic Approach to Accurate Evaluation of CD-Metrology Tools

Orji, Ndubuisi G., Bunday, Benjamin D., Dixson, Ronald G., Allgair, John A.

Year:

2007

Language:

english

File:

PDF, 4.12 MB

english, 2007

39

[IEEE 2007 IEEE International Conference on Microelectronic Test Structures - Bunkyo-ku, Japan (2007.03.19-2007.03.22)] 2007 IEEE International Conference on Microelectronic Test Structures - Study of Test Structures for Use as Reference Materials for Optical Critical Dimension Applications

Allen, Richard A., Patrick, Heather J., Bishop, Michael, Germer, Thomas A., Dixson, Ronald, Guthrie, William F., Cresswell, Michael W.

Year:

2007

Language:

english

File:

PDF, 6.39 MB

english, 2007

40

Line edge roughness metrology using atomic force microscopes

Orji, Ndubuisi G, Vorburger, Theodore V, Fu, Joseph, Dixson, Ronald G, Nguyen, Cattien V, Raja, Jayaraman

Journal:

Measurement Science and Technology

Year:

2005

Language:

english

File:

PDF, 1.02 MB

english, 2005

41

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Metrology, Inspection, and Process Control for Microlithography XII - Measurement of pitch and width samples with the NIST calibrated atomic force microscope

Dixson, Ronald G., Koening, Rainer G., Vorburger, Theodore V., Fu, Joseph, Tsai, Vincent W., Singh, Bhanwar

Year:

1998

Language:

english

File:

PDF, 753 KB

english, 1998

42

SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - Multiple-order imaging for optical critical dimension metrology using microscope characterization

Qin, Jing, Zhou, Hui, Barnes, Bryan M., Goasmat, Francois, Dixson, Ronald, Silver, Richard M., Postek, Michael T., Coleman, Victoria A., Orji, Ndubuisi G.

Year:

2012

Language:

english

File:

PDF, 1.60 MB

english, 2012

43

[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications

Patrick, Heather J., Germer, Thomas A., Cresswell, Michael W., Allen, Richard A., Dixson, Ronald G., Bishop, Michael, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, D

Year:

2007

Language:

english

File:

PDF, 575 KB

english, 2007

44

[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Linewidth Measurement Based on Automatically Matched and Stitched AFM Images

Chu, Wei, Fu, Joseph, Dixson, Ronald, Vorburger, Theodore, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.

Year:

2007

Language:

english

File:

PDF, 816 KB

english, 2007

45

[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - CD Reference Materials Fabricated on Monolithic 200 mm Wafers for Automated Metrology Tool Applications

Allen, Richard A., Dixson, Ronald G., Cresswell, Michael W., Guthrie, William F., Shulver, Byron J. R., Bunting, A. S., Stevenson, J. T. M., Walton, Anthony J., Seiler, David G., Diebold, Alain C., Mc

Year:

2007

Language:

english

File:

PDF, 1.13 MB

english, 2007

46

[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Correction of Hysteresis in SPM Images by a Moving Window Correlation Method

Fu, Joseph, Chu, Wei, Dixson, Ronald, Orji, George, Vorburger, Theodore, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.

Year:

2009

Language:

english

File:

PDF, 1.13 MB

english, 2009

47

AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - A Traceable Scatterometry Measurement of a Silicon Line Grating

Germer, Thomas A., Patrick, Heather J., Dixson, Ronald G., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.

Year:

2011

Language:

english

File:

PDF, 156 KB

english, 2011

48

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - TSOM method for semiconductor metrology

Attota, Ravikiran, Dixson, Ronald G., Kramar, John A., Potzick, James E., Vladár, András E., Bunday, Benjamin, Novak, Erik, Rudack, Andrew, Raymond, Christopher J.

Year:

2011

Language:

english

File:

PDF, 3.17 MB

english, 2011

49

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Metrology, Inspection, and Process Control for Microlithography XIII - Intercomparison of SEM, AFM, and electrical linewidths

Villarrubia, John S., Dixson, Ronald G., Jones, Samuel N., Lowney, Jeremiah R., Postek, Jr., Michael T., Allen, Richard A., Cresswell, Michael W., Singh, Bhanwar

Year:

1999

Language:

english

File:

PDF, 3.27 MB

english, 1999

50

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Leveraging LER to minimize linewidth measurement uncertainty in a calibration exercise

Robert, James, Banke, Bill, Dixson, Ronald, Archie, Chas N.

Year:

2007

Language:

english

File:

PDF, 367 KB

english, 2007